NanoPVD Magnetron Sputtering


The nanoPVD-S10A is a magnetron sputtering deposition system of both conductive and dielectric coatings, capable of covering beam-sensitive samples with high uniformity and stability. It can produce coating grids for TEM observations with layers of high conductivity and thermal inertia capable of offering electrical, mechanical and thermal stability for observations in ultra-high resolution. Co-deposition is possible, as is reactive sputtering via a gas/pressure control module that can support up to 3 process gases. It is is able to hold substrates up to 4″ diameter.

📍 The system is located at the “Ennio de Giorgi” Department of Mathematics and Physics of the University of Salento.

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