Scanning Electron Microscope (SEM) with EDX Imaging System

The HITACHI SU3800 SEM is an integrated SEM-EDX imaging system capable of operating both in vacuum and variable pressure conditions, essential for establishing with nanometric resolution and high depth of field the quality of the prepared samples, their stability at electron beam and the possible presence of chemical contamination that would affect the performance of the [HOLO-TEM](../holo-tem/).
The acceleration voltage is variable between 0.3 kV - 30 kV in steps of 100V, it has a large sample chamber, high resolution color camera to automatically acquire an image necessary for sample positioning. It has various types of low vacuum SE detector based on SE-photon conversion. It can be used in high vacuum as a monochromatic CL detector. Moreover, it has a BSE detector and a X-ray detector for EDX analysis of the sample.

📍 The system is located at the “Ennio de Giorgi” Department of Mathematics and Physics of the University of Salento.